Optical apparatus, inspection apparatus and alignment method

Abstract

This invention relates to an optical device for inspecting optical integrated circuits, comprising: a light source that emits light; an illumination optics unit that shapes the light emitted from the light source into a predetermined shape; a modulation unit that has a spatial light modulator that receives the light shaped by the illumination optics unit, modulates the received light using the spatial light modulator, and emits emitted light with a predetermined pattern shape; and a light guide unit that guides the emitted light from the modulation unit to the input end of an optical waveguide path disposed in the optical integrated circuit. This invention can shorten the time required for in-core processing and can efficiently inspect the optical waveguide path disposed in the optical integrated circuit.

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