Microscope apparatus and observation methods

Abstract

This disclosure discloses an observation method that involves irradiating the surface of an object with laser light to form a processing area on the object having a processing profile intersecting the surface, and observing the processing profile. The method comprises: a processing step in which, when the surface is perpendicular to a first direction, and when the processing area includes a plurality of lines arranged in a second direction (i.e., a plurality of lines extending in a third direction), while the incident direction of the laser light relative to the surface is tilted towards one side of the second direction relative to the first direction, the laser light is focused towards the object, and the irradiated area of ​​the laser light is moved along each of the plurality of lines; and an observation step in which the end face of the processing area on the other side of the second direction is observed as the processing profile.

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