Inspection device and inspection method

Abstract

The purpose of this invention is to improve the inspection accuracy of cavity defects using ultrasound. According to the inspection apparatus of the embodiment, the processor uses a detector to irradiate a reference point on a substrate from the side of a second main surface; the detector receives a first reflected wave reflected from the reference point; based on the time from the irradiation of the first ultrasound to the receipt of the first reflected wave, a first time required to receive the reflected wave reflected from the first cavity defect is estimated, and a first detection period is set based on the first time; based on the time from the irradiation of the first ultrasound to the receipt of the first reflected wave, a second time required to receive the reflected wave reflected from the second cavity defect is estimated, and a second detection period is set based on the second time.

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