probe

Abstract

[Problem] To provide a probe that reliably prevents condensation during probe testing. [Solution] A probe 1 includes: a sealing member 37, which is disposed between a retaining member 62 and a clamp 34, forming a sealed space S on its inner side for mounting a probe 65; a suction passage 84, which is connected to a vacuum source 100 via an external pipe 92 for depressurizing the sealed space; a regulator 104, which adjusts the flow of fluid in the external pipe 92 to bring the negative pressure acting on the sealed space S close to a set pressure; a gas supply unit 110, which supplies dry gas to the sealed space S; and a pressure control unit 20, which controls the regulator 104. The gas supply unit 110 supplies dry gas when the regulator 104 is activated. The pressure control unit 20 corrects the set pressure based on the flow rate of the dry gas to prevent backflow of fluid from the external pipe 92 to the sealed space S during the operation of the regulator 104 and the gas supply unit 110. none

Images