Probe pin and method of manufacturing the same

Abstract

According to an embodiment of the present invention, a probe is used in a semiconductor testing apparatus for receiving electrical signals from a tester and inspecting a semiconductor wafer. The probe includes: a connection portion electrically connected to the tester; an elastic portion connected at one end to the connection portion and applying elastic force when the probe contacts the semiconductor wafer; and a contact portion connected at one end to the other end of the elastic portion, the other end of which contacts the semiconductor wafer. The cross-sections of the connection portion and the contact portion have rounded rectangular vertices, and the elastic portion extends in the length direction, is recessed in the width direction, and forms a bend in one or both directions.

Images