Scanning control device and semiconductor inspection equipment

TW202638070AInactive Publication Date: 2026-09-16DONGFANG JINGYUAN ELECTRON LTD
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Patent Information

Application Number
TW114144143
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-10
Filing Date
2025-11-12
Publication Date
2026-09-16
Estimated Expiration
Not applicable · inactive patent

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Abstract

The disclosure provides a scanning control device and a semiconductor inspection equipment. The scanning control device may include: a first chip, a control chip, and a storage chip. The control chip is connected to both the first chip and the storage chip. The first chip generates a scanning waveform parameter based on a scanning parameter. The storage chip receives the scanning waveform parameter transmitted by the first chip through the control chip and stores the scanning waveform parameter. The control chip receives a first signal transmitted by the storage chip after completing the storage of the scanning waveform parameter, obtain the scanning waveform parameter from the storage chip according to the first signal, and output the scanning waveform parameter. The scanning waveform parameter is used to instruct the generation of a scanning waveform. Generating the scanning waveform parameter through the first chip can improve the generation efficiency of the scanning waveform parameter.
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