Writing apparatus

Abstract

The drawing head of the drawing device of the present invention comprises: a DMD (23) including a group of micromirrors; an illumination optical system that guides illumination light emitted from a light source to the DMD (23); a projection optical system that guides drawing light emitted from the DMD (23) to a substrate; a modulator holding part (50) that holds the DMD (23) and includes an adjustment mechanism (60) that adjusts at least one of the position and orientation of the DMD (23); and a cooling part (25) that receives non-drawing light emitted from the DMD (23) and is thermally isolated from the DMD (23) and the adjustment mechanism (60) in the modulator holding part (50). A writing head of a writing apparatus comprises a DMD (23) including a micro mirror group, an irradiation optical system guiding an irradiation light emitted from a light source to the DMD (23), a projection optical system guiding a writing light derived from the DMD (23) to a substrate, a modulator holder (50) including an adjusting mechanism (60) holding the DMD (23) for adjusting at least one of a position and a direction of the DMD (23), and a cooler (25) for receiving a non-writing light derived from the DMD (23), the cooler being thermally isolated from peripheral portions of the DMD (23) and the adjusting mechanism (60) in the modulator holder (50).

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