3D modelling of pressure flows in a processing chamber

TW202638287APending Publication Date: 2026-09-16VAT HOLDING AG
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Patent Information

Application Number
TW114144216
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-11-15
Filing Date
2025-11-13
Publication Date
2026-09-16

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Abstract

for determining pressure in a region of interest of a processing chamber, the processing chamber comprising a support structure to support an object to be processed in the processing chamber, at least one controllable fluid inlet and at least one controllable fluid outlet, and a set of pressure sensors, the set of pressure sensors comprising a plurality of pressure sensors. The method comprises providing
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