Charged-particle microscope with multiple imaging modes

TW202638468APending Publication Date: 2026-09-16CARL ZEISS MULTISEM GMBH
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Patent Information

Application Number
TW114147588
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-05
Filing Date
2025-12-04
Publication Date
2026-09-16

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Abstract

to selectively deflect the secondary charged particles depending on their kinetic energies. Various imaging modes such as momentum-resolved and energy-resolved imaging are supported.
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