Method of adapting focal settings and system thereof

Abstract

The disclosure relates to a method of adapting focal settings and a multi-beam system thereof. The method comprises providing a focal setting map of a region of interest of a sample comprising a set of focal settings, acquiring an image by scanning a subregion of the region of interest with a plurality of charged particle beams with focal settings provided by the focal setting map, determining a focal setting error, and updating the focal setting map based on the focal setting error. The multi-beam system comprises a plurality of charged particle beams, a sample stage, a processing device comprising a memory and a control processor, wherein the processing device is configured to provide a focal setting map of a region of interest of a sample comprising a set of focal settings, control the multi-beam-system to acquire an image by scanning a subregion of the region of interest with the plurality of charged particle beams with focal settings provided by the focal setting map, determine a focal setting error and update the focal setting map based on the focal setting error.

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