Electrostatic chuck with conductive mesh

TW202638480APending Publication Date: 2026-09-16APPLIED MATERIALS INC
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Patent Information

Application Number
TW114137141
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-12
Filing Date
2025-09-26
Publication Date
2026-09-16

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    Figure TWG2TA001076279_003
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Abstract

The present disclosure describes a filter assembly for a heater line of a processing chamber. The filter assembly includes a first impedance producing element, a first air core inductor, and a second air core inductor. The first impedance producing element includes a first conductive lead and a second conductive lead wound around a first toroid shaped core. A first end of the first conductive lead and a first end of the second conductive lead are coupled to an output of an electric device. The first air core inductor is electrically connected with the first conductive lead. The second air core inductor is electrically connected with the second conductive lead.
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