Electronic component transfer apparatus, semiconductor manufacturing apparatus and fixture

TW202638724APending Publication Date: 2026-09-16KIOXIA CORP
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Patent Information

Application Number
TW114128820
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-12
Filing Date
2025-07-30
Publication Date
2026-09-16

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Abstract

According to one embodiment, an electronic component transfer device includes a chuck and a retainer. The chuck has: an adsorption surface, which, when viewed from above, has a rectangular shape including a first side extending along a first direction and a second side extending along a second direction intersecting the first direction, and adsorbs and holds electronic components; a first side surface intersecting the adsorption surface along the first direction; and a second side surface intersecting the adsorption surface along the second direction. The retainer has: a first sidewall contacting the first side surface and having a first height, and a second sidewall contacting the second side surface and having a second height lower than the first height, and holds the chuck.
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