Semiconductor devices and methods for manufacturing semiconductor devices
TW202638755APending Publication Date: 2026-09-16RAPIDUS CORP
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Patent Information
- Application Number
- TW114151219
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-10-14
- Filing Date
- 2025-12-24
- Publication Date
- 2026-09-16
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Abstract
A semiconductor device includes: a semiconductor substrate having a protrusion on a main surface side; a nanosheet stack made of a semiconductor material disposed on the protrusion of the semiconductor substrate; a gate electrode covering the entire circumference of each nanosheet constituting the nanosheet stack through a gate insulating film; and an oxide film continuously covering the area from the upper surface of the protrusion of the semiconductor substrate to the sidewall.
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