Fin to fin trench contact through a metal gate cut
TW202638758APending Publication Date: 2026-09-16INTEL CORP
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Patent Information
- Application Number
- TW115122530
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2021-06-25
- Filing Date
- 2022-03-17
- Publication Date
- 2026-09-16
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Figure TWG2TA001077433_001 
Figure TWG2TA001077433_002 
Figure TWG2TA001077433_003
Abstract
Embodiments described herein may be related to apparatuses, processes, and techniques related to manufacturing a gate structure that includes adjacent gates that are coupled with the first fin and a second fin, with a metal gate cut across the adjacent gates and a trench connector between the adjacent gates that electrically couples the first fin and the second fin. Other embodiments may be described and / or claimed.
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