Integrated circuit device

TW202638761APending Publication Date: 2026-09-16SAMSUNG ELECTRONICS CO LTD
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Patent Information

Application Number
TW114142447
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-07
Filing Date
2025-10-31
Publication Date
2026-09-16

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    Figure TWG2TA001076376_003
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Abstract

An integrated circuit device includes at least one nanosheet, a pair of source / drain regions contacting the at least one nanosheet, a gate line between the pair of source / drain regions in a first horizontal direction and surrounding the at least one nanosheet, an insulating wall structure having a first sidewall contacting the pair of source / drain regions and facing the gate line, a gate dielectric film surrounding the gate line, and a pair of blocking insulating spacers arranged, in a plan view, in a gap area between the first sidewall and the gate line, in a second horizontal direction, and respectively contacting the pair of source / drain regions, wherein the pair of blocking insulating spacers are spaced apart from one another in the first horizontal direction in the gap area and each include a portion contacting the gate dielectric film and a portion contacting the first sidewall of the insulating wall structure.
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