Semiconductor structure and fabricating method thereof
TW202638777APending Publication Date: 2026-09-16TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
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Patent Information
- Application Number
- TW114117750
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-03-14
- Filing Date
- 2025-05-12
- Publication Date
- 2026-09-16
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Figure TWG2TA001076115_001 
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Abstract
High resistance structures and methods for making such structures are provided. A method includes performing a formation process to form a first sacrificial structure over a first region of a substrate; and replacing the first sacrificial structure with a high resistance structure.
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