Substrate processing apparatus and supply apparatus

TW202638865APending Publication Date: 2026-09-16EBARA CORP
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Patent Information

Application Number
TW115104095
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-02-28
Filing Date
2026-02-03
Publication Date
2026-09-16

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    Figure TWG2TA001077144_003
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Abstract

While a utility supply part supplying a utility to a substrate processing table is provided, a substrate processing apparatus provided enables swinging of a swing arm through which the utility supply part is inserted. A substrate processing apparatus
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