High temperature liquid supply system, semiconductor manufacturing device, and high temperature liquid supply method

TW202638873APending Publication Date: 2026-09-16GRAND PLASTIC TECH
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Patent Information

Application Number
TW114109227
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Filing Date
2025-03-12
Publication Date
2026-09-16

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Abstract

The present application provides a high temperature liquid supply system, a semiconductor manufacturing device, and a high temperature liquid supply method. The high temperature liquid supply system includes a tank, an external circulation pipeline, a nozzle, and a first valve. The tank is used to store liquid with a predetermined temperature range. The external circulation pipeline is connected to the tank to transport liquid. The first valve is arranged on the external circulation pipeline, and is used for adjusting the liquid to a small flow rate, and delivering the small flow rate of liquid to the nozzle, and the rest of the liquid is returned to the tank.
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