Method, device, and application thereof for measuring gas within a foup

Abstract

This invention provides a method, device, and application thereof for measuring gas within a foup. Comprising to constructing a closed gas circuit through at least two of the valve ports of the foup to an internal chamber, and driving gas generates an internal circulation flow between the gas circuit and the chamber, and the content of a judgment factor in the internal circulation gas is measured, so as to detect the airtightness of the chamber. The invention also provides a measuring device for the gas in the foup, and the measuring method and device can also be used for detecting the humidity in the chamber.

Description

[Technical Field]

[0001] This invention relates to a conveyor box for storing materials, which may be one of semiconductor wafers, electronic carriers or circuit boards. This invention is particularly concerned with a method, apparatus and application for measuring gas in the material box. [Previous Technology]

[0002] Currently, on production lines for semiconductor wafers, electronic substrates, and circuit boards, a front-opening unified pod (FOUP) is used to contain the materials. An overhead crane (OHT) suspends and transports the FOUP to various process stations for material processing. The FOUP has an internal compartment for containing the materials, which must maintain a high level of cleanliness and dryness. Furthermore, depending on the requirements of some processes, this compartment may also be filled with a significant concentration of process gases (e.g., nitrogen (N2), ultra-clean dry air (XCDA)). Therefore, the airtightness of this compartment is strictly required by manufacturers to maintain the process quality of the contained materials.

[0003] Please refer to Figures 1a to 1e together. Figure 1a shows the conventional structure of the material box 10, which consists of a hollow shell 11 and a door 12. Figure 1b shows that the door 12 can be unlocked and separated from the shell 11 to open the opening 16 of the shell 11 and expose the internal compartment space 14, in which the material is placed. Furthermore, an airtight rubber ring 121 is provided on the periphery of the inner surface of the door 12 to prevent air from entering after the door 12 and the shell 11 are locked. Furthermore, the housing 11 has a seat 13 on one side, the bottom surface of which is flat. Figure 1c further reveals that the bottom surface of the seat 13 has multiple valve ports 15 that can connect to the compartment space 14 as needed for filling with the process gas; the valve ports 15 include two pairs of inlet valve ports 151 and two pairs of exhaust valve ports 152. In addition, Figures 1d and 1e also reveal that the inlet valve port 151 and the exhaust valve port 152 are each composed of a one-way check valve that can control the gas flow direction, wherein the solid arrow indicates the direction in which the gas can push open the valve, so that the opening directions of the inlet valve port 151 and the exhaust valve port 152 are opposite. In detail, the one-way check valve of the inlet valve 151 (as shown in Figure 1d) can control the gas to enter the compartment space 14 of the material box 10 from the outside in one direction, and the one-way check valve of the outlet valve 152 (as shown in Figure 1e) can control the gas to be discharged from the compartment space 14 of the material box 10 from the outside in one direction.

[0004] The aforementioned air inlet valve 151 can be opened by the push of the air supply pressure in an air supply line, or by the push of a protrusion in the air supply line, and the aforementioned exhaust valve 152 needs to be opened by the internal pressure of the gas accumulated in the compartment space 14. Although the aforementioned valves 15 all have the function of one-way preventing gas from entering or exiting the compartment space 14, and the gas-stopping rubber ring 121 of the door plate 12 also has the function of sealing the opening 16 (as shown in Figure 1b). However, over time, the gas-stopping function of these valves 15 may be affected by factors such as aging of the one-way check valve or poor assembly quality, and the gas-stopping rubber ring 121 on the door plate 12 may also be affected by factors such as aging or poor assembly quality; in addition, the gas-stopping or airtightness of these valves 15 and the door plate 12 will also be affected after long-term opening and closing operations.

[0005] It is known that when the gas-stopping or airtight function of the valve port 15 and the door plate 12 is not good, the gas inside the compartment space 14 can leak to the outside through the valve port 15 and the opening 16, and the unfiltered dirty air and moisture from the outside can also flow into the compartment space 14 through the valve port 15 and the opening 16, thereby affecting the cleanliness and dryness of the compartment space 14.

[0006] In order to overcome the problem of poor airtightness of the compartment space 14 of the material box 10, the manufacturer will conduct an airtightness test on the compartment space 14 of the material box 10 and then remove the material box 10 with poor airtightness.

[0007] Patent TWI753040B discloses an airtightness detection technology for a material box. It discloses that a measuring line is connected to at least one of the air inlet valves 151 of the material box 10. The measuring line is equipped with a protrusion for opening the air inlet valve 151. A flow controller or a pressure sensor is also connected in series on the measuring line to fill the measuring line with gas and guide it into the compartment space 14. Then, the filling of gas is stopped, so that the gas in the interconnected measuring line and the compartment space 14 maintains a specific internal pressure. Then, at a specific time, the leakage flow rate of the gas in the measuring line and the compartment space 14 is measured by the flow controller or the pressure sensor, or the internal pressure of the remaining gas is measured to detect the airtightness of the compartment space 14 of the material box 10.

[0008] However, the gas tightness detection method of the TWI753040B patent for measuring gas leakage or pressure drop can only obtain an estimate of the gas pressure remaining in the compartment space 14 at best, but it cannot know whether the gas concentration and dryness (or humidity) remaining in the compartment space 14 have met the standards. This is its shortcoming and therefore needs to be improved. [Summary of the Invention]

[0009] The present invention will take the material box 10 shown in Figures 1a to 1e as an example to illustrate a method for measuring the gas carried in the material box 10, so as to apply it to detect the airtightness of the material box 10 and to detect the concentration and humidity of the gas therein.

[0010] Therefore, the method for measuring the gas in the material box includes: constructing a closed gas circuit, connecting the gas circuit to the chamber space via at least two valve ports, continuously agitating the gas to generate an internal circulation flow between the chamber space and the gas circuit, and measuring the content of a judgment factor in the internal circulation gas to detect the airtightness of the chamber space and the concentration of the gas.

[0011] In a further embodiment, before agitating the gas to generate an internal circulation flow, the gas is first filled into the compartment space via the gas circuit. Alternatively, before the gas circuit is connected to the compartment space, the gas is first filled into the gas circuit.

[0012] In a further embodiment, the gas is nitrogen, an inert gas, or air. When the gas is nitrogen, the determining factor is the oxygen content or nitrogen content in the nitrogen. When the gas is an inert gas, the determining factor is the content of one of oxygen, helium, neon, argon, krypton, xenon, or radon. When the gas is air, the determining factor is the oxygen content in the air. The air includes ultra-clean dry air.

[0013] In a further embodiment, the gas measurement method also includes detecting the humidity in the cabin space, wherein the judgment factor is the water molecule content in the gas.

[0014] Furthermore, the present invention also provides a gas measuring device for a material box, thereby implementing the above method. The device includes: a gas actuator and a detection element connected in series on a gas delivery pipe; the gas delivery pipe is connected between at least two of the valve ports and communicates with the chamber space, for guiding the gas into the chamber space to form the closed gas circuit; the gas actuator is used to agitate the gas in the gas delivery pipe to generate an internal circulation flow between the chamber space and the gas delivery pipe; the detection element is connected in series on the gas delivery pipe and is located between the gas actuator 30 and one of the valve ports of the at least two valve ports, for measuring the content of a judgment factor in the internally circulating gas.

[0015] In a further embodiment, at least two of the valve ports include two air inlet valve ports. Each end of the air supply pipe is connected to a disc-shaped connector, and at least one of the disc-shaped connectors has a protrusion. The air supply pipe covers the two air inlet valve ports via the two disc-shaped connectors and is inserted into at least one of the air inlet valve ports via the protrusion, thereby connecting the air supply pipe to the compartment space.

[0016] In another embodiment, at least two of the valve ports include at least one inlet valve port and at least one exhaust valve port. The gas supply pipe is connected to at least one disc-shaped connector at each end, and the gas supply pipe covers at least one inlet valve port and at least one exhaust valve port via multiple disc-shaped connectors, thereby connecting the gas supply pipe to the compartment space. At least one of the multiple disc-shaped connectors may be configured with a protruding nozzle, allowing the gas supply pipe to be inserted into at least one inlet valve port via the protruding nozzle.

[0017] In a further embodiment, the measuring device is constructed on a platform on which the material box can be placed, and the disc connector is protruding on the platform to provide the valve port insertion for connecting the gas supply pipe when the material box is placed.

[0018] In a further embodiment, the gas pipeline extends to form at least one intake manifold connected to a gas supply end and at least one exhaust manifold capable of discharging the gas. The gas pipeline, the intake manifold, and the exhaust manifold are collectively equipped with multiple switches to control the timing of gas filling, flow, and discharge. Each of the multiple switches may be composed of a solenoid valve.

[0019] In further implementation, the gas actuator is one of the pumps or blowers.

[0020] In a further implementation, when the gas is nitrogen, the judgment factor is the oxygen content or nitrogen content in the nitrogen, and the detection element is an oxygen sensor or a gas monitor that can detect the nitrogen content.

[0021] When an inert gas is used as the gas and the content of one of oxygen, helium, neon, argon, krypton, xenon, and radon is detected as a judgment factor, the detection element is an oxygen sensor or a gas monitor that can detect the content of one of oxygen, helium, neon, argon, krypton, xenon, and radon.

[0022] When air is used as the gas and the oxygen content in the air is detected as the judgment factor, the detection element is an oxygen sensor.

[0023] When humidity detection is applied to the cabin space, and the water molecule content in the gas is used as the judgment factor, the detection element is a humidity sensor.

[0024] Based on the above, the effectiveness that the present invention can achieve is as follows:

[0025] 1. While detecting the airtightness of the material box, it can also detect the gas concentration and humidity in the compartment space, thereby fully maintaining the process quality of the material inside.

[0026] 2. It can perform airtightness testing of the material box according to the type and concentration of gas required in the process, and the higher the concentration of the gas used in the internal circulation, the more accurate the airtightness of the material box can be detected.

[0027] 3. The ability to carry away substances that could affect cleanliness and dryness from the compartment space by means of a gas loop that provides internal gas circulation, said substances including water molecules or other dirt or particles.

[0028] The implementation details and technical effects disclosed above will be presented in detail in the following figures and implementation methods.

Implementation Method

[0030] In the following description of the present invention, the material box 10 shown in Figures 1a to 1d will be used as an example to illustrate that when the door 12 of the material box 10 is locked in the opening 16 of the box seat 11 to produce an airtight effect, the airtightness of the compartment space 14 and the concentration of the internal gas can be detected by the measurement method described later in the present invention.

[0031] First, please refer to Figure 2, which discloses the execution procedure of the first measurement method of the present invention, including sequentially executing the following steps S10 to S30, wherein:

[0032] Step S10: Constructing the gas circuit

[0033] Please refer to Figure 3, which discloses the first configuration of the gas circuit 20. This step involves constructing a closed gas circuit 20 for guiding gas flow between the two pairs of inlet valve ports 151a and 151b of the housing 11. The gas circuit 20 can be a pipeline made of soft or rigid gas pipes (detailed later) connected in series or in series and in parallel. Each end of the gas circuit 20 is provided with a disc connector 21. The gas circuit 20 can be connected to the two pairs of inlet valve ports 151a and 151b by means of the disc connectors 21 at both ends.

[0034] In this example, one of the two intake valve ports 151a and 151b (for example, intake valve port 151b shown in Figure 3) must be forced to be used as an exhaust port in order to specifically construct the gas circuit 20.

[0035] Accordingly, please refer to Figures 4a and 4b to see that the two disc-shaped connectors 21 must be distinguished into a disc-shaped connector 21a without the protrusion 211 (as shown in Figure 4a) and a disc-shaped connector 21b with the protrusion 211 (as shown in Figure 4b). The disc connector 21a without the protruding nozzle 211 is connected to the air inlet valve 151a (as shown in Figure 4a). This allows the one-way check valve in the air inlet valve 151a to be naturally opened by the supply pressure within the gas circuit 20, thus enabling the air inlet valve 151a to serve as an air inlet for supplying gas into the compartment space 14. The disc connector 21b with the protruding nozzle 211 is connected to the air inlet valve 151b (as shown in Figure 4a). The protruding nozzle 211 forcibly opens the one-way check valve in the air inlet valve 151b, enabling the air inlet valve 151b to serve as an exhaust outlet for the compartment space 14, thereby allowing the gas circuit 20 to communicate with the compartment space 14. The dashed arrows in Figure 3 indicate the path and direction of the gas circulation within the gas circuit 20.

[0036] Please refer to Figure 5, which discloses a second embodiment of the gas circuit 23. The gas circuit 23 has pairs of two disc-shaped connectors 21 and 22 at both ends, for connecting to pairs of intake valve ports 151a and 151b and pairs of exhaust valve ports 152a and 152b, respectively. Furthermore, the embodiment shown in Figure 5 differs from the embodiment shown in Figure 3 in that:

[0037] The disc connector 21 used to connect the air intake valve ports 151a and 151b can be, depending on the current situation of the equipment, a disc connector 21b without the protruding nozzle 211 as shown in Figure 4b, or a disc connector 21a with the protruding nozzle 211 as shown in Figure 4b.

[0038] Additionally, please refer to Figure 6, which reveals that the disc connector 22 used to connect the exhaust valve ports 152a and 152b is a disc connector 22b without the protruding nozzle 211.

[0039] Accordingly, the two ends of the gas circuit 23 can be connected to the compartment space 14 via the disc connectors 21 and 22. In Figure 5, the dashed arrows indicate the path and direction of the gas circulating within the gas circuit 20.

[0040] Furthermore, the two ends of the gas circuit 23 only need to each have a single disc connector 21, 22 respectively connected to a single inlet valve port 151a (or 151b) and a single outlet valve port 152a (or 152b) to produce the same function of connecting the compartment space 14.

[0041] It must be noted that before the gas circuit 23 and the interior of the compartment space 14 are connected, they already contain gas (hereinafter referred to as the original gas, such as air or nitrogen), and when the gas circuit 23 and the compartment space 14 are connected, the original gas (such as air or nitrogen) can flow naturally between the gas circuit 23 and the compartment space 14. In addition, external filling gas (hereinafter referred to as filling gas) can also enter the compartment space 14 through the gas circuit 23.

[0042] Step S20: Agitate the gas to generate internal circulation flow

[0043] As shown in Figures 3 and 5, this step involves installing a gas actuator 30 in series with the gas circuits 20 and 23. The gas actuator 30 is made of a pump capable of agitating gas to generate a flow rate, or a blower, to agitate the gas (including at least one of the existing gas and the filling gas) within the gas circuits 20 and 23 and the chamber space 14 to generate an internal circulation flow between the chamber space 14 and the gas circuits 20 and 23 (the direction of gas flow is indicated by dashed arrows in the figures), causing at least one of the existing gas and the filling gas to transform into a test gas. This transformation includes mixing due to the circulation flow.

[0044] Figure 3 also reveals that the original gas or filling gas in the gas circuit 20 can enter the chamber space 14 through one of the two paired inlet valve ports 151a and 151b (e.g., 151a), and the original gas or filling gas in the chamber space 14 can flow back into the gas circuit 20 through the other of the two paired inlet valve ports 151a and 151b (e.g., 151b), generating an internal circulation flow of the gas under test. Figure 5 reveals that the original gas or filling gas in the gas circuit 23 can enter the chamber space 14 through the two paired inlet valve ports 151a and 151b, and the original gas or filling gas in the chamber space 14 can flow back into the gas circuit 23 through the two paired exhaust valve ports 152a and 152b, generating an internal circulation flow of the gas under test.

[0045] Step S30: Measure the content of the judgment factor in the gas.

[0046] Please refer again to Figures 3 and 5, which disclose that this step involves connecting a detection element 40 in series on the gas circuits 20 and 23 (i.e., the gas supply pipes), such that the detection element 40 is adjacent to the inlet valve port 151b at the exhaust end and the gas actuator 30 (as shown in Figure 3), or the detection element 40 is adjacent to the two exhaust valve ports 152a and 152b (or one of the exhaust valve ports 152a or 152b) at the exhaust end and the gas actuator 30 (as shown in Figure 5), in order to measure the content of a judgment factor in the test gas in the internal circulation flow when the gas internal circulation flow begins in step S20 or after an execution time (described in detail later).

[0047] When the gas being tested is air, the detection element 40 may be an oxygen sensor (O2 sensor), and the judgment factor is the oxygen content in the air. Alternatively, when the gas being tested is nitrogen, the detection element 40 may be the oxygen sensor or a gas monitor capable of detecting nitrogen content, and the judgment factor may be the oxygen content or nitrogen content in the nitrogen.

[0048] During the measurement, if the content of the judgment factor in the tested gas decreases and the decrease exceeds the standard set by the quality control department, it indicates that the airtightness of the material box 10 is poor. This means that the nitrogen (i.e., the tested gas) in the chamber space 14 has leaked out through the opening 16 or any of the valve ports 15 beyond the standard set by the quality control department, and should be considered a defective product and removed from the production line. Furthermore, by measuring the content of the judgment factor in the tested gas, the concentration of the tested gas can be determined simultaneously to maintain the process quality of the internal materials.

[0049] In addition, the gas being tested can also be an inert gas commonly used in the process, ultra-clean dry air, or air from the atmospheric environment. When the gas being tested is an inert gas, the detection element 40 is an oxygen sensor as described above, or a gas monitor capable of detecting the content of helium, neon, argon, krypton, xenon, or radon. The judgment factor is one of oxygen, helium, neon, argon, krypton, xenon, or radon. It must be noted that the original gases in the gas circuit 23 and the chamber space 14 can be the same or different gases, and can all be mixed to form the gas being tested and used as the judgment factor. Therefore, it does not affect the progress of the above steps S10 to S30.

[0050] Step S11: Filling gas enters the compartment space

[0051] Please refer again to Figures 3 and 5, which disclose that this step can provide sufficient quantity and a considerable concentration of the filling gas through the gas guide channel (described in detail later) connected to one side of the gas circuits 20 and 23, so that the filling gas enters the compartment space 14 through the gas circuits 20 and 23 to form a positive pressure. The positive pressure means that the gas pressure in the gas circuits 20 and 23 and the compartment space 14 is greater than the air pressure in the atmospheric environment (1 atm).

[0052] In this step, the filling gas may be the same as or different from the original gas in step S20, and both can be mixed to become the test gas in step S30. Furthermore, the filling gas may be selected according to the material box 10 for containing materials or for process requirements. For example, the filling gas may be one of the aforementioned nitrogen (N2), air or inert gas, and the air includes known ultra-clean dry air (XCDA).

[0053] In the above steps S11 to S30, for example, nitrogen (N2) is used as the filling gas, and the execution time is 360 seconds. This means that before executing step S11 (0 seconds ago), if the original gas in the gas circuits 20 and 23 and the compartment space 14 is air, then in step S11, nitrogen with a concentration of 99.99% is used as the filling gas, and after the 0th second... Nitrogen filling is stopped between 120 and 121 seconds, resulting in a nitrogen concentration (99.99%) higher than that in natural air, or a nitrogen concentration (79%). After a settling period between 121 and 160 seconds, the original gas (e.g., air) is allowed to mix thoroughly with the filling gas (99% nitrogen) to form the test gas (e.g., 80% nitrogen). Then, in step S20, the nitrogen is agitated to form a closed-loop internal circulation flow between 161 and 170 seconds. Subsequently, the detection element 40 performs the measurement in step S30 between 171 and 360 seconds. In addition, step S30 can also be performed at any point in time during the period from when the filling gas enters the chamber space 14 in step S11 to when the internal circulation of the agitated gas ends in step S20 (i.e., the 170th second). This helps to increase the amount of measurement data of the judgment factor or shorten the execution time of 360 seconds.

[0054] The detection element 40 may be an oxygen sensor or a gas monitor that can detect nitrogen content, so that the detection element 40 can detect the oxygen content or nitrogen content in the 80% concentration nitrogen gas in the internal circulation flow as the judgment factor.

[0055] In particular, if the oxygen or nitrogen content of the gas being tested decreases during the measurement period, and the decrease exceeds the standard set by the quality control department, it indicates that the airtightness of the material box 10 is poor. That is, it means that 80% of the nitrogen gas (i.e. the gas being tested) in the chamber space 14 is leaking out from the opening 16 or any of the valve ports 15, which exceeds the standard set by the quality control department. It should be regarded as a defective product and removed from the production line of the manufacturing process.

[0056] Accordingly, in the detection procedure shown in Figure 7, the gas in the gas circuits 20 and 23 can be filled by external sources to increase its concentration. It is known that the higher the concentration of the gas used in the internal circulation, the more accurate the airtightness of the material box can be detected.

[0057] Next, please refer to FIG8 to disclose the execution procedure of the third measurement method of the present invention. It is explained that after performing the aforementioned step S10 and before performing step S20 (as shown in FIG2), the following steps S12 to S13 are additionally performed in sequence.

[0058] Step S12: Filling gas enters the gas circuit

[0059] Please refer to Figures 9a and 10a in advance, which respectively reveal the architecture of two gas circuits. It shows that the gas circuits 20 and 23 constructed in step S10 have not yet been connected to the valve port 15 of the material box 10. At this time, this step S12 is performed to fill gas into the gas circuits 20 and 23.

[0060] The difference between this step S12 and the aforementioned step S11 is that step S11 involves filling the chamber space 14 with gas when the gas circuits 20 and 23 are connected to the valve port 15 of the material box 10, while step S12 involves filling with filling gas when the gas circuits 20 and 23 are not connected to the valve port 15, so that the filling gas can accumulate in the gas circuits 20 and 23 beforehand and generate positive pressure. Otherwise, it is the same as the content described in the aforementioned step S11.

[0061] Step S13: Gas circuit connects to the compartment space

[0062] The purpose of this step is that after the gas circuits 20 and 23 are filled with the filling gas with positive pressure, the gas circuits 20 and 23 are connected to the valve port 15 of the material box 10 according to the aforementioned embodiment, so that the filling gas with positive pressure in the gas circuits 20 and 23 can be quickly filled into the chamber space and pressurized, so as to continue to perform the aforementioned internal circulation flow of agitated gas generation (i.e., step S20) and the determination factor content in the tested gas (step S30).

[0063] Accordingly, in the detection procedure shown in Figure 8, the gas circuits 20 and 23 can be filled with sufficient gas in advance, without waiting to be connected to the material box 10 before filling with gas, thus accelerating the measurement procedure.

[0064] Furthermore, the present invention also includes using the above-mentioned methods for measuring various internal circulating gases to detect the humidity within the compartment space 14 of the material box 10. In this case, the determining factor is the water molecule content in the gas, and the detection element 40 must be replaced with a humidity sensor capable of detecting the water molecule content in the gas, for detecting the humidity within the compartment space 14 of the cleaned material box 10, thereby controlling the dryness within the compartment space 14 to meet the standards set by the quality control department. Apart from this, the implementation content is the same as the above-mentioned various measurement methods.

[0065] In addition, in order to realize the above detection method, please continue to refer to FIG9a, which discloses a schematic diagram of the configuration of the first measuring device of the present invention, to illustrate the device configuration of the measuring technology shown in FIG3, especially including the implementation details of the aforementioned step 10 of constructing the gas circuit.

[0066] As shown in FIG9a, the measuring device includes a gas supply pipe 201 for connecting the gas actuator 30 and the detection element 40 in series. Therefore, the gas circuit 20 shown in FIG3 is formed by connecting the gas actuator 30 and the detection element 40 in segments through the gas supply pipe 201. The gas supply pipe 201 shown as solid lines in FIG9a constitutes the gas circuit 20 shown in FIG3. Two pairs of disc connectors 21a and 21b are installed at both ends of the gas supply pipe 201 so that they can be connected to the two pairs of air inlet valve ports 151a and 151b of the material box 10 during measurement. With this configuration, the detection element 40 can be located between the gas actuator 30 and any one of the two pairs of air inlet valve ports 151a and 151b through the series connection of the gas supply pipe 201.

[0067] Figure 9a also reveals that an intake manifold 202 and a pressure relief pipe 204 are forked on the gas supply pipe 201, and a connecting pipe 205 can also be connected between the gas supply pipe 201 located on both sides of the gas actuator 30 and the detection element 40.

[0068] Furthermore, a plurality of switches 51-56 are spaced apart on the gas supply pipe 201, and the plurality of switches may be made of solenoid valves or other electric or manual switches. Figure 9a shows a solenoid valve as one of the switches, illustrating that the plurality of switches may include a first switch 51 connected in series with the intake manifold 202, a second switch 52 connected in series with the inlet end of the gas supply pipe 201 adjacent to the disc connector 21a, a third switch 53 connected in series with the gas supply pipe 201 adjacent to the disc connector 21a and the gas actuator 30, a fourth switch 54 connected in series with the gas supply pipe 201 between the detection element 40 and the second switch 52, a fifth switch 55 connected in series with the connecting pipe 205, and a sixth switch 56 connected in series with the pressure relief pipe 204. Figure 9a shows that when all of the plurality of switches 51-56 are closed, the measuring device is in standby mode.

[0069] Figure 9b is a first operation illustration of Figure 9a, further revealing the execution state of steps S20 and S30 shown in Figure 2.

[0070] As shown in Figure 9b, the gas circuit 20 constructed in Figure 9a can be connected to the inlet valves 151a and 151b of the material box 10 shown in Figure 3 via the disc-shaped connectors 21a and 21b at both ends of the gas supply pipe 201. Subsequently, the second switch 52, the third switch 53, and the fourth switch 54 are opened, while the first switch 51, the fifth switch 55, and the sixth switch 56 remain closed. At this time, the gas originally stored in the gas supply pipe 201 can be agitated by the gas actuator 30 and introduced into the chamber space 14 through the inlet valve 151a, where it mixes with the original gas in the chamber space 14 and is then discharged back into the gas supply pipe 201 through the inlet valve 151b, forming a closed-loop internal circulation of the gas to be tested. The detection element 40 is then used to measure the content of the judgment factor in the gas to be tested. In Figure 9b, the pipes at the filling points represent gas, and the dashed arrows indicate the direction of gas flow.

[0071] Figure 9c is a second operational illustration of Figure 9a, further revealing the execution state of step S11 of Figure 7, in which the filling gas enters the chamber space 14.

[0072] As shown in Figure 9c, the disc connectors 21a and 21b at both ends of the gas supply pipe 201 are connected to the air inlet valves 151a and 151b of the material box 10, so that the gas circuit 20 is connected to the compartment space 14 (i.e., step S13 is executed); at this time, the fourth switch 54 and the fifth switch 55 are kept closed, while the remaining first switch 51, second switch 52, third switch 53 and sixth switch 56 are all open, so that the filling gas (e.g., nitrogen with a concentration of 99.99%) can be guided through the air inlet manifold 202. The gas enters the chamber space 14 through the gas supply pipe 201 and the disc connector 21a and is pressurized. The pressurized filling gas in the chamber space 14 can also flow back to the gas supply pipe 201 through the disc connector 21b. During this period, the gas actuator 30 can actuate as needed to ensure that the filling gas can fully fill the gas supply pipe 201, the connecting pipe 205 and the chamber space 14 and become the gas under test. However, when the pressure of the filling gas guided from the gas supply line by the intake manifold 202 is very sufficient, the gas actuator 30 may not actuate in step S11.

[0073] Accordingly, before filling the gas, if the original gas (e.g., air) in the chamber space 14 is inconsistent with the filling gas (e.g., nitrogen with a concentration of 99.99%), the filling pressure of the nitrogen can be greater than the internal air pressure in the chamber space 14, and they can be mixed to form, for example, a nitrogen concentration of 80%, which will be used as the test gas for subsequent airtightness measurement. Alternatively, before filling the filling gas, if the original gas (e.g., nitrogen) in the chamber space 14 is consistent with the filling gas (e.g., nitrogen), regardless of whether the nitrogen concentration is consistent or inconsistent, a specific concentration of nitrogen can be obtained after filling and mixing, which will be used as the test gas for subsequent airtightness measurement. Furthermore, if the chamber space 14 is in a vacuum state and there is no gas before filling it with the gas, the negative pressure environment in the chamber space 14 can be changed to a positive pressure environment by the filling gas (taking nitrogen with a concentration of 99.99% as an example), and the concentration of the filling nitrogen can be maintained at 99.99%, which is used as the test gas for subsequent measurement of airtightness.

[0074] Furthermore, Figure 9c also reveals that when the pressure of the gas being tested accumulated in the chamber 14 exceeds a saturation state, the pressure generated by the gas being tested can drive the two paired exhaust valves 152a and 152b to open, thereby venting the excess gas being tested to the outside of the chamber 14. In addition, Figure 9c also reveals that excess gas being tested flowing back to the gas supply pipe 201 via the disc connector 21a can also be discharged to the outside via the pressure relief pipe 204 through the sixth switch 56 which is already open, so that the gas collected and integrated in the gas supply pipe 201 and the connecting pipe 205 can be maintained at the same saturation state as the chamber 14. In Figures 9b and 9c, the pipes with the filling mesh indicate that they are filled with the gas, and the dashed arrows indicate the filling and flow direction of the gas.

[0075] Wherein, if the concentration of the test gas (e.g., nitrogen) accumulated in the compartment space 14 decreases due to mixing with the original gas (e.g., air) in the compartment space 14, it can be discharged under full pressure through the exhaust valve ports 152a and 152b during the filling process, thereby increasing the concentration of the test gas (e.g., nitrogen) accumulated in the compartment space 14. Furthermore, it is known that the higher the concentration of the test gas used in the internal circulation, the more accurate the airtightness of the material box can be detected.

[0076] Furthermore, the two paired exhaust valve ports 152a and 152b and the pressure relief pipe 204 can each be connected to a gas recovery pipe (not shown) to collect excess gas. This allows substances that could affect cleanliness and dryness (e.g., water molecules or other dirt or particles) to exit the compartment space 14 from at least one of the exhaust valve ports 152a and 152b and the pressure relief pipe 204, thereby improving the cleanliness and dryness of the compartment space 14.

[0077] Next, please refer to Figure 9b to illustrate the execution pattern of steps S20 and S30, which are the same as those in Figure 2, following step S11 shown in Figure 9c.

[0078] Figure 9d is a third operation explanation diagram of Figure 9a, which further reveals the execution state of step S12 of Figure 8, in which gas is filled into the gas circuit.

[0079] As shown in Figure 9d, the disc joints 21a and 21b at both ends of the gas supply pipe 201 are not yet connected to the air inlet valves 151a and 151b of the material box 10. At this time, all the first switches 51 to the sixth switches 56 are opened, and the high-concentration filling gas is guided into the gas supply pipe 201 and the connecting pipe 205 through the air inlet manifold 202, so that the gas circuit 20 can quickly establish a high-concentration and saturated filling gas. The excess filling gas can be discharged to the outside through the disc joints 21a and 21b and the pressure relief pipe 204.

[0080] Then please refer to Figure 9b to explain that in the operation shown in Figure 8, after completing step S12 of filling the gas circuit as shown in Figure 9d, the state of connecting the gas circuit to the cabin space in step S13 is executed, and after step S13 is completed, the execution state of the same as step S20 and step S30 shown in Figure 2 is executed.

[0081] In addition, in order to implement the above detection method, please refer to FIG10a, which discloses a schematic diagram of the configuration of the second measuring device of the present invention, to illustrate the device configuration of the measuring technology shown in FIG5, and in particular the implementation details of the aforementioned step 10 of constructing the gas circuit.

[0082] As shown in FIG10a, the measuring device includes a gas supply pipe 231 for connecting the gas actuator 30 and the detection element 40 in series. The solid gas supply pipe 231 shown in FIG10a constitutes the gas circuit 23 shown in FIG5. The implementation shown in FIG10a differs from FIG9a in the following ways:

[0083] Regardless of whether one or both disc connectors 21 have protrusions 211, they are connected to one end of the gas supply pipe 231 so that during measurement, they can be correspondingly connected to the two or one of the air inlet valve ports 151a and 151b on the base 11 of the material box 10; and the two or one of the disc connectors 22 without protrusions 211 are installed at the other end of the gas supply pipe 231 so that during measurement, they can be correspondingly connected to the two or one of the exhaust valve ports 152a and 152b on the base 11 of the material box 10. With this configuration, the detection element 40 can be located between the gas actuator 30 and any of the two air inlet valve ports 151a and 151b via the series connection of the gas supply pipe 231.

[0084] The gas supply pipe 231 between the intake valve ports 151a, 151b and the exhaust valve ports 152a, 152b is interleaved with an intake manifold 232, an exhaust manifold 233 and a pressure relief pipe 234 connected to the gas supply end, and a connecting pipe 235 can also be connected in parallel between the gas supply pipes 231 located on both sides of the gas actuator 30 and the detection element 40.

[0085] Furthermore, a plurality of switches 61-67, which can be operated electrically or manually by solenoid valves or other means, are arranged at intervals on the air supply pipe 231. Figure 10a illustrates that the plurality of switches may include a first switch 61 connected in series with the intake manifold 232, a second switch 62 connected in series with the exhaust manifold 233, a third switch 63 connected in series with the inlet end of the air supply pipe 231 adjacent to the intake valve ports 151a, 151b, a fourth switch 64 connected in series with the air supply pipe 231 adjacent to the exhaust valve ports 152a, 152b and the gas actuator 30, a fifth switch 65 connected in series with the air supply pipe 231 between the detection element 40 and the third switch 63, a sixth switch 66 connected in series with the connecting pipe 235, and a seventh switch 67 connected in series with the pressure relief pipe 234. Figure 10a also shows that the plurality of switches 61-67 are all in a standby state with the valves closed (off). Apart from that, the implementation of Figure 10a is largely the same as that of Figure 9a.

[0086] Figure 10b is a first operation explanation diagram of Figure 10a, which further reveals the execution state of steps S20 and S30 shown in Figure 2.

[0087] As shown in Figure 10b, the gas circuit 23 constructed in Figure 10a can be connected to the inlet valve ports 151a and 151b and the exhaust valve ports 152a and 152b of the material box 10 shown in Figure 5 via the disc-shaped connectors 21 and 22 at both ends of the gas supply pipe 231. Subsequently, the third switch 63, the fourth switch 64 and the fifth switch 65 are opened, while the first switch 61, the second switch 62, the sixth switch 66 and the seventh switch 67 remain closed. At this time, the gas already present in the gas supply pipe 231 can be agitated by the gas actuator 30 and introduced into the chamber space 14 through the inlet valves 151a and 151b, where it mixes with the gas already present in the chamber space 14. The mixture is then discharged back into the gas supply pipe 231 through the exhaust valves 152a and 152b, forming a closed-loop internal circulation of the gas being tested. The detection element 40 then measures the judgment factor in the gas being tested. In Figure 10b, the pipe with the plugged mesh represents the original gas, and the dashed arrows indicate the direction of the gas being tested.

[0088] Figure 10c is a second operational illustration of Figure 10a, further revealing the execution state of step S11 of Figure 7, in which the filling gas enters the chamber space 14.

[0089] Figure 10c shows the execution state of step S11 of Figure 9c, where gas is filled into the chamber space 14, according to the connection method of Figure 10b. The difference between Figure 10c and Figure 9c is that the fifth switch 65 is closed, while the other switches 61, 62, 63, 64, 66, and 67 are all open. This allows the gas stored in the gas circuit 23 to enter the chamber space 14 through the bidirectional paired disc connectors 21 and 22 on the gas supply pipe 231 and become the gas to be tested, so that the same steps S20 and S30 as described above can be executed subsequently.

[0090] Figure 10d is a third operation explanation diagram of Figure 10a, which further reveals the execution state of step S12 of Figure 8, in which gas is filled into the gas circuit 23.

[0091] As shown in Figure 10d, the disc joints 21 and 22 at both ends of the gas supply pipe 231 are not yet connected to the inlet valve ports 151a and 151b and the exhaust valve ports 152a and 152b of the material box 10. At this time, all the first switches 61 to the seventh switches 67 are opened, and the high-concentration filling gas is guided into the gas supply pipe 231 and the connecting pipe 235 through the inlet manifold 232, so that the gas circuit 23 can quickly establish a high-concentration and saturated filling gas. The excess filling gas can be discharged to the outside through the disc joints 21 and 22, the exhaust manifold 233, and the pressure relief pipe 234.

[0092] Then please refer to Figure 10b to explain that in the operation shown in Figure 8, after completing step S12 of filling the gas circuit as shown in Figure 10d, the state of connecting the gas circuit to the cabin space in step S13 is executed, and after step S13 is completed, the execution state of the same as step S20 and step S30 shown in Figure 2 is executed.

[0093] Furthermore, in the embodiment of the present invention relating to humidity detection, the gas internal circulation mode shown in FIG9b and FIG10b can be referred to, and a humidity detector can be used as the detection element 40 to perform the humidity detection described in the detection method.

[0094] Furthermore, please refer to FIG11, which discloses that the measuring device shown in FIG10a can be constructed on a platform 70 for placing the material box 10. The platform 70 can be a platform on a material loader or other workbench, such that the disc connector 21 with the protrusion 211 and the disc connector 22 without the protrusion 211 both protrude on the platform 70 and are respectively connected to the air supply pipe 231. In addition, the components connected via the air supply pipe 231 in the above embodiment can be configured in the body of the platform 70. The platform 70 can be used to perform step S13, which connects the aforementioned gas circuits 20 and 23 to the compartment space 14. Specifically, when the material box 10 is placed, the air inlet ports 151a and 151b on the box base 11 of the material box 10 can connect to the disc connector 21 with a protruding nozzle 211, and the protruding nozzle 211 can open the one-way check valve inside the disc connector 21. Furthermore, the exhaust valve ports 152a and 152b on the box base 11 can connect to the disc connector 22 without the protruding nozzle 211, thereby facilitating the connection of the gas supply pipe to guide the gas into and out of the compartment space 14. Additionally, the implementation components shown in Figure 9a can also be assembled and configured using this platform to place the material box 10, thereby connecting the gas circuit and performing the aforementioned gas measurement process.

[0095] In summary, the implementation details of the detection device of the present invention are sufficient to specifically implement the detection method of the present invention. Both the detection method and the device have the ability to detect the airtightness, gas concentration and humidity of the compartment space of the material box. Compared with the prior art, it should have industrial applicability and technological advancement.

[0096] The above embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. In particular, the gas described in the claims should be interpreted as one of the aforementioned original gas, filling gas, and test gas. Therefore, the present invention should be determined by the claims as defined in the claims. [Simplified Explanation of the Diagram]

[0029] Figure 1a is a perspective view of an existing material box. Figure 1b is an exploded perspective view of the material box shown in Figure 1a. Figure 1c is a bottom view of the material box shown in Figure 1a, revealing the configuration details of the inlet and outlet valves. Figure 1d is a cross-sectional view of the inlet valve shown in Figure 1c. Figure 1e is a cross-sectional view of the outlet valve shown in Figure 1c. Figure 2 is a flowchart of the steps of the first measurement method of the present invention. Figure 3 is an explanatory diagram of one configuration of the measurement method shown in Figure 2, revealing an embodiment in which the inlet valve of the material box is connected to a closed gas circuit. Figure 4a is an explanatory diagram of one configuration in which the inlet valve shown in Figures 3 and 5 provides a gas circuit connection. Figure 4b is another explanatory diagram in which the inlet valve shown in Figures 3 and 5 provides a gas circuit connection. Figure 5 is another explanatory diagram in which the measurement method shown in Figure 2 is configured, revealing an embodiment in which the inlet and outlet valves of the material box are connected to a closed gas circuit. Figure 6 is an explanatory diagram in which the outlet valve shown in Figure 5 provides a gas circuit connection. Figure 7 is a flowchart of the second measurement method of the present invention. Figure 8 is a flowchart of the third measurement method of the present invention. Figure 9a is a schematic diagram of the configuration of the first measurement device of the present invention, further revealing the device configuration of the measurement technology shown in Figure 3. Figure 9b is a first operation explanation diagram of Figure 9a, further revealing the execution state of steps S20 to S30 shown in Figures 2 and 7, and steps S13 to S30 shown in Figure 8. Figure 9c is a second operation explanation diagram of Figure 9a, further revealing the execution state of step S11 of Figure 7, in which filling gas enters the chamber space. Figure 9d is a third operation explanation diagram of Figure 9a, further revealing the execution state of step S12 of Figure 8, in which filling gas enters the gas circuit. Figure 10a is a schematic diagram of the configuration of the second measurement device of the present invention, further revealing the device configuration of the measurement technology shown in Figure 5. Figure 10b is a first operational illustration of Figure 10a, further revealing the execution of steps S20 to S30 shown in Figures 2 and 7, and steps S13 to S30 shown in Figure 8. Figure 10c is a second operational illustration of Figure 10a, further revealing the execution of step S11, shown in Figure 7, where filling gas enters the chamber space. Figure 10d is a third operational illustration of Figure 10a, further revealing the execution of step S12, shown in Figure 8, where filling gas enters the gas circuit. Figure 11 is a partial cross-sectional view of the measuring device shown in Figure 10a constructed on a workbench platform.

Claims

1. A method for measuring gas within a material box, used to measure gas within a compartment of the material box, the compartment being formed within a box base and sealed by a door latch, the box base having at least two valves controlling the timing of ventilation between the compartment and the outside, the detection method comprising: A closed gas circuit is constructed, which is connected to the compartment space via at least two valve ports. The gas is then continuously agitated to generate an internal circulation flow between the compartment space and the gas circuit. The content of a judgment factor in the internally circulating gas is measured to detect the airtightness of the compartment space and the concentration of the gas.

2. The method for measuring gas in the material box as claimed in claim 1, wherein before agitating the gas to generate an internal circulation flow, the method further includes filling the chamber space with the gas via the gas circuit.

3. The method for measuring gas in the material box as described in claim 1, wherein before the gas circuit is connected to the compartment space, the method further includes filling the gas circuit with gas.

4. A method for measuring gas in a material box as described in claim 1, 2 or 3, wherein the gas is nitrogen and the determination factor is the nitrogen content or oxygen content in the nitrogen.

5. A method for measuring gas in a material box as described in claim 1, 2 or 3, wherein the gas is air and the judgment factor is the oxygen content in the air.

6. A method for measuring the gas in the material box as described in claim 1, 2 or 3, wherein the gas is an inert gas and the determination factor is the content of one of oxygen, helium, neon, argon, krypton, xenon or radon.

7. The method for measuring gas in a material box as described in claim 1, 2 or 3 further includes detecting humidity in the chamber space, wherein the determining factor is the water molecule content in the gas.

8. A gas measuring device for a material box, used to measure gas in a compartment of the material box, the compartment being formed within a box base and closed by a door latch, the box base having at least two valves to control the timing of ventilation between the compartment and the outside, the measuring device comprising: A gas supply pipe, connected between at least two of the valve ports and communicating with the compartment space, is used to guide the gas into the compartment space to form a closed gas circuit; a gas actuator, connected in series with the gas supply pipe, is used to actuate the gas in the gas supply pipe to generate an internal circulation flow between the compartment space and the gas supply pipe; and a detection element, connected in series with the gas supply pipe and located between the gas actuator 30 and one of the valve ports of the at least two valve ports, is used to measure the content of a judgment factor in the internally circulating gas.

9. The gas measuring device in the material box as claimed in claim 8, wherein at least two of the valve ports include two air inlet valve ports, both ends of the gas supply pipe are respectively connected to a disc connector, at least one of the two disc connectors has a protrusion, the gas supply pipe covers the two air inlet valve ports through the two disc connectors, and is inserted into at least one of the air inlet valve ports through the protrusion, thereby connecting the gas supply pipe to the compartment space.

10. The gas measuring device in the material box as claimed in claim 8, wherein at least two of the valve ports include at least one inlet valve port and at least one outlet valve port.

11. The gas measuring device in the material box as claimed in claim 10, wherein the gas supply pipe is connected to at least one disc connector at each end, and the gas supply pipe is covered by at least one of the inlet valve ports and at least one of the exhaust valve ports via a plurality of the disc connectors, thereby connecting the gas supply pipe to the compartment space.

12. The gas measuring device in the material box as claimed in claim 11, wherein at least one of the plurality of disc connectors has a nozzle, and the gas delivery tube is inserted into at least one of the gas inlet ports via at least one of the nozzles.

13. The gas measuring device for the material box as described in claim 9 or 11, constructed on a platform on which the material box can be placed, with the disc connector protruding from the platform to provide the valve port for connection to the gas supply pipe when the material box is placed.

14. The gas measuring device in the material box as claimed in claim 8, wherein the gas supply pipe further extends to form at least one inlet manifold connected to a gas supply end and at least one exhaust manifold capable of discharging the gas, and the gas supply pipe, the inlet manifold and the exhaust manifold are provided with a plurality of switches for controlling the timing of gas filling, diversion and discharge.

15. The gas measuring device in the material box as described in claim 14, wherein each of the plurality of said switches is composed of a solenoid valve.

16. The gas measuring device for the material box as described in claim 8, wherein the gas actuator is one of a pump or a blower.

17. The gas measuring device for a material box as claimed in claim 8, wherein the gas is nitrogen, the determining factor is the oxygen content or nitrogen content in the nitrogen, and the detection element is an oxygen sensor or a gas monitor capable of detecting nitrogen content.

18. The gas measuring device for the material box as described in claim 8, wherein the gas is an inert gas, the determining factor is the content of one of oxygen, helium, neon, argon, krypton, xenon, and radon, and the detection element is an oxygen sensor or a gas monitor capable of detecting the content of one of oxygen, helium, neon, argon, krypton, xenon, and radon.

19. The gas measuring device for a material box as claimed in claim 8, wherein the gas is air, the judgment factor is the oxygen content in the air, and the detection element is an oxygen sensor.

20. The gas measuring device in the material box as claimed in claim 8, further comprising a device for detecting humidity in the chamber space, wherein the determination factor is the water molecule content in the gas, and the detection element is a humidity sensor.

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