Substrate processing system and teaching method

Abstract

A technique is provided that enables each substrate to be moved to a target position with high precision when multiple substrates are simultaneously transported. The substrate processing system includes: a transport module; a first transport device disposed in the transport module, having multiple end effectors that respectively support multiple substrates and capable of transporting multiple substrates simultaneously; and a control device that controls the operation of the first transport device. The control device controls the following steps: step (A), which calculates the center-to-center distance between the multiple substrates when they are supported by the multiple end effectors; and step (B), which adjusts the position of the multiple substrates held by the multiple end effectors based on the center-to-center distance calculated in step (A) and a design value of the center-to-center distance between the multiple substrates.

Images