Apparatus for transporting substrates, system for processing substrates, and method for processing substrates.

Abstract

[Problem] A substrate is transported in a substrate transport chamber by a substrate transport module utilizing magnetic levitation. [Solution] The substrate transport chamber is configured to include: a substrate transport chamber having a ground surface with a first magnet and a substrate processing chamber for processing substrates connected via an opening; and a substrate transport module having a substrate holding portion for holding the substrate and a second magnet acting with a repulsive force between the substrate and the first magnet, and is configured to move within the substrate transport chamber by magnetic levitation using the repulsive force. The substrate transport module is configured to directly enter the substrate transport chamber via the opening and transport substrates in and out, or to receive and transfer substrates between itself and a substrate transport mechanism fixedly installed within the substrate transport chamber.

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