Automated center finding process
TW202638903APending Publication Date: 2026-09-16APPLIED MATERIALS INC
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Patent Information
- Application Number
- TW114139911
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-03-07
- Filing Date
- 2025-10-16
- Publication Date
- 2026-09-16
Smart Images
Figure TWG2TA001076323_001 
Figure TWG2TA001076323_002 
Figure TWG2TA001076323_003
Abstract
A method includes loading an end effector with a substrate and determining robot arm positions corresponding to physical locations on the substrate using a fixed sensor. A center point of the substrate is determined using the physical locations. One or more offset values representing a physical relationship between a calibration point of the end effector and the center point of the substrate are calculated. The substrate on the end effector is repositioned on the end effector based on the one or more offset values.
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