System including at least two different types of flexures

Abstract

A system can include different types of flexures. In a non-limiting implementation, one of the flexures can include a guiding flexure, and another flexure can include a decoupling flexure. The guiding flexure can allow translation of a movable object in a desired direction. The decoupling flexure can help to reduce movement in undesired directions and rotational movement. In the same or different implementation, an actuator system can include an actuator that is coupled to the flexures. The actuator system can be incorporated as a sub-assembly into a larger system. In an implementation, the larger system may be a die bonding system. A method of using the die bonding system can allow for the position of a movable platform to allow for more precise positioning of a die to a die bonding site of a bonding substrate.

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