electrostatic chuck

Abstract

The objective of this invention is to provide an electrostatic chuck that facilitates electrical connection between an internal electrode and a power supply terminal. The solution is an electrostatic chuck 10 comprising: a dielectric substrate 100; an RF electrode 140 disposed within the dielectric substrate 100; a power supply terminal 170 disposed inside a recess 160 formed in a surface 120 of the dielectric substrate 100 opposite to the mounting surface; and a connection portion 190 electrically connecting the RF electrode 140 and the power supply terminal 170. In this electrostatic chuck 10, the distance T from the bottom surface 161 of the recess 160 to the RF electrode 140 is greater than 0.05 mm.

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