Overlap susceptor and preheat ring

TW202638931APending Publication Date: 2026-09-16APPLIED MATERIALS INC
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Patent Information

Application Number
TW115119446
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2021-04-07
Filing Date
2022-04-07
Publication Date
2026-09-16

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    Figure TWG2TA001077384_003
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Abstract

Embodiments disclosed herein generally provide improved control of gas flow in processing chambers. In at least one embodiment, a liner for a processing chamber includes an annular body having a sidewall and a vent formed in the annular body for exhausting gas from inside to outside the annular body. The vent comprises one or more vent holes disposed through the sidewall. The liner further includes an opening in the annular body for substrate loading and unloading.
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