Method of forming semiconductor transistor structure, semiconductor device, and method of forming integrated circuit

TW202638938APending Publication Date: 2026-09-16TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
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Patent Information

Application Number
TW114118715
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-13
Filing Date
2025-05-19
Publication Date
2026-09-16

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Abstract

A semiconductor transistor mesa isolation structure and method of forming the same including a mesa isolation structure located between a first gate and a second gate, the mesa isolation structure including sidewalls latitudinally offset from each of the first gate and the second gate, and the mesa isolation structure extending through an interior of a barrier layer of the semiconductor transistor, and the mesa isolation structure formed with a dielectric material.
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