Heater unit and electrostatic clamp

Abstract

The present invention provides a heater unit and an electrostatic clamp that can improve temperature uniformity. The heater unit of the present invention includes: a heating layer (10) having a heating surface (13) disposed on one side of a main surface (10a) for heating an object; a heating layer (14) disposed inside the heating layer (10); and a lower layer (21) disposed on the opposite side of the heating surface (13) of the heating layer (10); wherein the lower layer (21) has a heat dissipation surface (22) located on the opposite side of the heating layer (10), and the thermal resistance between the heating layer (14) and the heating surface (13) is less than the thermal resistance between the heating layer (14) and the heat dissipation surface (22).

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