Tomographic scanning system and method for laser-modified region

TW202639084APending Publication Date: 2026-10-01蔚华科技股份有限公司
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Patent Information

Application Number
TW114115920
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-02-20
Filing Date
2025-04-28
Publication Date
2026-10-01

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Abstract

A tomographic scanning system and method for a laser-modified region is provided. The system utilizes nonlinear optical effects to perform high-resolution scanning of the laser-modified region inside a solid material. The system comprises a light source, an objective lens, a filter, a photodetector, and a computing device. The light source generates a fundamental beam, which irradiates the solid material, causing reflection, refraction, and scattering, while inducing nonlinear light in the laser-modified region. The objective lens is positioned between the light source and the solid material, responsible for adjusting the focal plane of the beam. By progressively varying the focal distance, the system scans the modified region along the thickness direction of the solid material. The filter removes the fundamental beam and retains the nonlinear light, which is then detected by the photodetector. The detected signal is transmitted to the computing device, which processes and analyzes the collected data to construct a three-dimensional geometric model of the laser-modified region, thereby obtaining comprehensive internal structural information.
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