Corrosion-resistant components and their manufacturing methods

Abstract

The objective of this invention is to provide a corrosion-resistant component with improved corrosion resistance or plasma etching resistance and excellent practicality, and a method for manufacturing the same. As a solution of this invention, a method for manufacturing a corrosion-resistant component comprises a substrate and a yttrium oxide film formed on the surface of the substrate. The method is characterized in that the alignment degree ratio of the (400) facet of the yttrium oxide film, calculated from the alignment degree, is 0.5 or higher. This alignment degree is evaluated using Harris's formula based on the peak intensities of (211), (222), (400), (440), and (622) at each diffraction peak obtained by X-ray diffraction. Furthermore, to achieve this, a film-forming step is performed by blowing a yttrium-containing raw material gas onto the substrate while irradiating it with laser light to form a yttrium oxide film on the surface of the substrate. The film-forming temperature during the formation of the yttrium oxide film is set to 850°C or higher.

Images