Silicide bodies and related methods and articles

TW202639472APending Publication Date: 2026-10-01HERAEUS CONAMIC NORTH AMERICA LLC
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Patent Information

Application Number
TW114147896
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-12
Filing Date
2025-12-08
Publication Date
2026-10-01

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Abstract

Described are silicide bodies useful in an interior of a plasma reaction chamber; methods of preparing the silicide bodies; and methods of using the silicide bodies. Also described is a reaction chamber component adapted for use in a plasma reaction chamber, the component including an electrically conductive silicide body having at least 85percent by weight of a single silicide material comprising a metal, the silicide body including a density of at least
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