Tungsten-silicon-nitrogen sputtering target, assembly and method of making

TW202639473APending Publication Date: 2026-10-01SOZOTEX PERFORMANCE MATERIALS AMERICA INC
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Patent Information

Application Number
TW115100897
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2026-01-06
Filing Date
2026-01-09
Publication Date
2026-10-01

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Abstract

A sputtering target assembly includes a WxSi100-x-yNy sputtering target wherein x is
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