Compounds, photoacid generators, and resin compositions for photolithography

Abstract

This invention provides a solidifiable compound. The compound of this invention is represented by the following general formula (1). In the following general formula (1), R1 represents an alkyl group, R2 represents a substituted alkyl group or a hydrogen atom, and Rf represents a phenyl group in which at least one hydrogen atom can be substituted by a fluorine atom. Wherein, R1 is an alkyl group having two or more carbon atoms, or R2 is an alkyl group or a hydrogen atom substituted by an alkoxy group. none