High purity precursor compositions and related methods

TW202639577APending Publication Date: 2026-10-01ENTEGRIS INC
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Patent Information

Application Number
TW115102522
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-01-22
Filing Date
2026-01-22
Publication Date
2026-10-01

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Abstract

High purity precursor compositions and related methods are provided herein. The method includes obtaining a first reactant and a second reactant. The method includes contacting the first reactant and the second reactant to form a reaction product. The reaction product has a purity of at least
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