Hardening composition, film forming method, pattern forming method and article manufacturing method

Abstract

A curable composition comprising a polymerizable compound (a), a photopolymerization initiator (b), and a solvent (d), wherein the content of the solvent (d) in the entire curable composition is greater than 5% by volume and less than 95% by volume, the polymerizable compound (a) comprises an N-vinyl compound (a1), a monofunctional acrylate compound (a2), and a polyfunctional (meth)acrylate compound (a3), the molecular weight of the N-vinyl compound (a1) is more than 150 and less than 300, and the content of the N-vinyl compound (a1) is more than 5 parts by mass and less than 45 parts by mass relative to 100 parts by mass of the total polymerizable compound (a).

Images