Compositions comprising an enaminolate ligand, precursor vessel, method and system for depositing a material comprising a metal from group 4, group 5, group 6 or group 13 on a substrate

TW202639924APending Publication Date: 2026-10-01ASM IP HLDG BV
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Patent Information

Application Number
TW114145856
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-11-29
Filing Date
2025-11-25
Publication Date
2026-10-01

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Abstract

as well as methods for synthesizing metal precursors. Compositions of the present invention comprise a coordination compound comprising a metal from group
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