Furnace tube equipment

Abstract

This application discloses a furnace tube device, relating to the field of semiconductor manufacturing equipment, comprising: a process tube, the interior of which includes a process zone, a first vent at the lower part of the process tube, and a second vent at the upper part of the process tube; a first vent pipe connected to the first vent; and a second vent pipe connected to the second vent, wherein a valve is provided on the second vent pipe, the valve opening during the removal of moisture from the process zone to discharge moisture from the upper region of the process zone through the second vent pipe, and the valve closing during non-moisture removal processes to shut off the second vent pipe.

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