System and apparatus for temperature distribution

TW202639933APending Publication Date: 2026-10-01ASM IP HLDG BV
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Patent Information

Application Number
TW114146968
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-06
Filing Date
2025-12-02
Publication Date
2026-10-01

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Abstract

Various embodiments of the present technology may provide a radiation shield formed from a body having a plurality of cutouts. The radiation shield may also include a plurality of removable segments that are shaped to be disposed within the cutouts.
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