Blended contact fingers for preventing cracks during thin substrate handling

TW202639966APending Publication Date: 2026-10-01LAM RES CORP
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Patent Information

Application Number
TW115117090
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2020-04-30
Filing Date
2021-04-30
Publication Date
2026-10-01

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Abstract

A contact for providing a connection to a substrate in a substrate plating system includes a body having an arcuate shape. The arcuate shape of the body is configured to conform to a shape of at least a portion of a substrate arranged on a lip seal and a cup of the substrate plating system. A plurality of first contact fingers extend a first distance from the body. A plurality of second contact fingers extend a second distance from the body. The first distance is greater than the second distance.
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