Blended contact fingers for preventing cracks during thin substrate handling
TW202639966APending Publication Date: 2026-10-01LAM RES CORP
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- TW115117090
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2020-04-30
- Filing Date
- 2021-04-30
- Publication Date
- 2026-10-01
Smart Images

Figure 00000000_0000_ABST
Abstract
A contact for providing a connection to a substrate in a substrate plating system includes a body having an arcuate shape. The arcuate shape of the body is configured to conform to a shape of at least a portion of a substrate arranged on a lip seal and a cup of the substrate plating system. A plurality of first contact fingers extend a first distance from the body. A plurality of second contact fingers extend a second distance from the body. The first distance is greater than the second distance.
Need to check novelty before this filing date? Find Prior Art
