Drying apparatus and drying condition search system
TW202640077APending Publication Date: 2026-10-01THE UNIV OF TOKYO +1
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Patent Information
- Application Number
- TW115109789
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-03-19
- Filing Date
- 2026-03-16
- Publication Date
- 2026-10-01
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Figure TWG2TA001079565_001 
Figure TWG2TA001079565_002 
Figure TWG2TA001079565_003
Abstract
Provided is a drying apparatus and a drying condition search system that are capable of drying a substrate under diverse drying conditions. The drying apparatus, which is used in process informatics and dries a material C1 applied to a substrate C2, includes: multiple drying furnaces
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