Method of testing a packaging sample, method of operating an apparatus for testing of a packaging sample, and apparatus for testing a packaging sample

Abstract

A method of testing a packaging sample with at least one charged particle beam column is described. The method includes placing the packaging sample having a top side facing the at least one charged particle beam column and a bottom side opposite the top side in a vacuum chamber; contacting bottom contact pads provided on the bottom side of the packaging sample mechanically with a plurality of contact pins; directing a charged particle beam of the at least one charged particle beam column on at least a first top contact pad provided on the top side of the packaging sample; detecting signal electrons originating from the top side of the packaging sample; and testing one or more networks on the packaging sample in the vacuum chamber based upon one or more signals comprising the signal electrons.

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