Method for testing a packaging substrate, and apparatus for testing a packaging substrate

TW202640134APending Publication Date: 2026-10-01APPLIED MATERIALS INC
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Patent Information

Application Number
TW114148895
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-12
Filing Date
2025-12-12
Publication Date
2026-10-01

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Abstract

The present disclosure relates to an apparatus for testing a substrate in a vacuum chamber, the apparatus comprising: a vacuum chamber; a stage within the vacuum chamber, the stage configured to support the substrate; a sensor configured for determining a charging condition within the vacuum chamber, the sensor comprising: an antenna positioned within the vacuum chamber. Furthermore, the present disclosure relates to an according method, a computer program and a sensor.
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