Scanning probe microscope with probe immersed in liquid

Abstract

A method of analysing a sample using a scanning probe microscope. The scanning probe microscope comprises a lateral scanning system; and a probe head comprising: a transparent window; and a probe comprising a cantilever and a probe tip extending from the cantilever, wherein the probe is immersed in liquid. The method comprises: constraining an upper surface of the liquid with the transparent window; constraining a lower surface of the liquid with the sample; wherein the liquid has unconstrained sides which form a meniscus which meets the sample; and obtaining sample data by: generating a lateral scanning motion between the probe and the sample, by operation of the lateral scanning system, so that the probe tip interacts with the sample across a region of the sample, and monitoring the probe to obtain sample data from the region of the sample. The probe remains immersed in the liquid as the sample data is obtained; and the probe is monitored by: illuminating the cantilever with a detection beam via the transparent window and the liquid, and monitoring a reflection of the detection beam from the cantilever, wherein the reflection is received via the liquid and the transparent window.

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