Information processing device, prober, and probe card replacement method

TW202640145APending Publication Date: 2026-10-01TOKYO SEIMITSU CO LTD
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Patent Information

Application Number
TW115106623
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-28
Filing Date
2026-02-24
Publication Date
2026-10-01

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    Figure TWG2TA001079391_003
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Abstract

An information processing device includes a control unit configured to effect control such that a test head is disposed above a prober main body that holds a semiconductor wafer in the case of an inspection state in which inspection of semiconductor chips is performed by bringing probe needles of a probe card into contact with plural semiconductor chips formed on the semiconductor wafer, and to effect control such that the test head retreats from above the prober main body in the case of a replacement state in which the probe card is replaced by a transport device above the prober main body.
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