Turning element fabrication for optical waveguides

TW202640208APending Publication Date: 2026-10-01APPLIED MATERIALS INC
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Patent Information

Application Number
TW114146854
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-11-21
Filing Date
2025-12-01
Publication Date
2026-10-01

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Abstract

A method includes forming, within a cladding layer, at least one inner core to form at least one waveguide, forming, within the cladding layer using a pattern transfer layer, at least one trench having an angled surface, and forming at least one turning element on the angled surface of the at least one trench.
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