Self-referencing interferometric microscope
TW202640246APending Publication Date: 2026-10-01CAMTEK LTD
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Patent Information
- Application Number
- TW115108288
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-10-23
- Filing Date
- 2026-03-06
- Publication Date
- 2026-10-01
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Figure TWG2TA001079471_001 
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Abstract
A self-referencing interferometric microscope uses near-common-path, common component beam separators to produce two beams that illuminate the sample at different angles. Two return beams collected from the sample interfere at the image plane to produce an interferometric image of the sample comprising fringes across the image. The image can be processed to determine the topography of the sample.
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