Flexible actuator components and the manufacture thereof

TW202640296APending Publication Date: 2026-10-01ASML NETHERLANDS BV
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Patent Information

Application Number
TW114145056
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-06
Filing Date
2025-11-19
Publication Date
2026-10-01

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Abstract

GPa. An actuator may include a tip at a distal end of the actuator body, the tip including a flexible material that is softer than the actuator body, the flexible material configured to reduce a pressure between the object and the actuator body when the tip contacts the object.
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