Transmission image sensor for exposure apparatus

TW202640305APending Publication Date: 2026-10-01ASML NETHERLANDS BV
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Patent Information

Application Number
TW114148580
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-17
Filing Date
2025-12-11
Publication Date
2026-10-01

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Abstract

A transmission image sensor comprises a plurality of detector gratings, each of the detector gratings having a different pitch. A reticle grating provided at reticle level has a reticle grating pitch correlated to a pattern feature on the reticle. The transmission image sensor selects one of the plurality of detector gratings having a detector grating pitch substantially corresponding to the reticle grating pitch of the reticle grating as projected on a stage level of the stage of the exposure apparatus. A position of an aerial image of the reticle grating at reticle level is determined using the selected one of the plurality of detector gratings.
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