Manufacturing execution control system, manufacturing execution control method, and manufacturing execution control program

Abstract

The purpose of this invention is to provide a production execution control system that can shorten the processing time of priority batches in a manufacturing line. In the production execution control system 1000, the virtualization processing device 110 collects processing information by treating a defined substrate cleaning device group i as a hub in the wafer processing process. From the existing MES 100 side, this substrate cleaning device group i is virtually treated as a single manufacturing device, identified and controlled using a single identification information. Among the group control devices 310.i to 310.i+2 controlling the substrate cleaning device group i, information on specific priority batches and information indicating priority are shared. The group control devices of the preceding process are notified in advance to the group control devices of the following process to prepare for the processing of priority batches. In the subsequent process of the substrate cleaning device group i, by preparing for the processing of priority batches in advance, priority batches are processed ahead of other regular batches.

Images