Laser maintenance systems and processes

TW202640427APending Publication Date: 2026-10-01CYMER INC
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Patent Information

Application Number
TW115103531
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-01-30
Filing Date
2026-01-29
Publication Date
2026-10-01

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Abstract

A process or system of classifying the status of a laser system in one or more categories includes receiving a high-dimensional variable from the laser system, transforming the high-dimensional variable into a lower-dimensional variable corresponding to a linear classifier trained on a lower-dimensional data set produced from a high-dimensional data set by dimensional reduction without manual feature selection, and classifying the status of the laser system in the one or more categories by applying the trained lower-dimensional linear classifier to the lower-dimensional variable. A method of preparing a linear classifier includes performing dimensional reduction of a high-dimensional data set including a dimension for measured property of the system producing a lower-dimensional data set including label data in a labeled lower-dimensional data set and training a linear classifier using the labeled lower-dimensional data set.
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