Potential corrector unit, apparatus, and method of using the potential corrector unit

TW202640688APending Publication Date: 2026-10-01ASML NETHERLANDS BV
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Patent Information

Application Number
TW114146125
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-01-13
Filing Date
2025-11-26
Publication Date
2026-10-01

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    Figure TWG2TA001078574_003
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Abstract

The present invention provides a potential corrector unit for use in a charged particle beam assessment apparatus for assessing a sample. The potential corrector unit comprises a potential corrector configured to influence an electric potential at a peripheral region of a surface of the sample. The potential corrector is disposed upbeam of the sample.
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